213 nm Nd:YAG system with flat-top beam and water cooling. Provides energy density >27 J/cm² with multiple aperture spot configurations. Offers optical resolution of 2 µm and flexible chamber design.
213 nm Nd:YAG system with flat-top beam and water cooling. Provides energy density >27 J/cm² with multiple aperture spot configurations. Offers optical resolution of 2 µm and flexible chamber design.